Quantitative Depth Profiling Analysis of the Thin Film by rf-GD-OES
نویسندگان
چکیده
منابع مشابه
Deposition of Thin-Film Silicon for Photovoltaics: Use of VHF-GD and OES
Deposition rates over 10 Å/s can be obtained for device-grade microcrystalline silicon with the VHF-GD (Very High Frequency Glow Discharge) method, as applied to hydrogendiluted silane plasmas. The morphological phase transition from amorphous to microcrystalline silicon can be controlled by varying e.g. the applied VHF-power or the dilution level. The glow of the plasma associated with this mo...
متن کاملPractical Comparisons Between RF-GD-OES and GDMS
While GDMS is the technique of choice for high sensitivity metals and semiconductor analyses, there are no commercially available radio frequency-GDMS sources. Thus, bulk non-conductive materials must be ground to a powder, mixed with metal, and pressed to form a conductive disk. The analysis of thick oxide or polymer layers is not available directly. In some cases, a conductive metal mask (cal...
متن کاملCharacterization and Depth Analysis of Organic Thin Film Transistor
Organic semiconductor technology on polymer and flexible substrate is creating a base for researchers and industrial communities due to their ability to find application as a low cost, flexible and large area electronic device. In this paper an overview of Organic thin film transistor (OTFT) has been done. Different structures of OTFT have been explained on behalf of placement of source, gate a...
متن کاملThin-film passives in RF/microwave circuits
Until recently, most microwave capacitors were based on fired multilayer ceramic technology. In this process, layers of highly conductive electrode metal alloys are interleaved with low-loss ceramic dielectrics in a multilayer fashion until the target capacitance is obtained. The resulting stack is then sintered into a monolithic structure in a high-temperature firing process. This process cont...
متن کاملa comparative move analysis of the introduction sections of ma theses by iranian and native post-graduate students
since esp received universal attention to smooth the path for academic studies and productions, a great deal of research and studies have been directed towards this area. swales’ (1990) model of ra introduction move analysis has served a pioneering role of guiding many relevant studies and has proven to be productive in terms of helpful guidelines that are the outcome of voluminous productions ...
15 صفحه اولذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of The Surface Finishing Society of Japan
سال: 2015
ISSN: 0915-1869,1884-3409
DOI: 10.4139/sfj.66.631